Nonvolatile memory device and manufacturing method thereof

ABSTRACT

According to the nonvolatile memory device in one embodiment, contact plugs connect between second wires and third wires in a memory layer and a first wire connected to a control element. Drawn wire portions connect the second wires and the third wires with the contact plug. The drawn wire portion connected to the second wires and the third wires of the memory layer is formed of a wire with a critical dimension same as the second wires and the third wires and is in contact with the contact plug on an upper surface and both side surfaces of the drawn wire portion.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromthe prior Japanese Patent Application No. 2010-066801, filed on Mar. 23,2010; the entire contents of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a nonvolatile memorydevice and a manufacturing method thereof.

BACKGROUND

In recent years, a three-dimensional cross-point type nonvolatile memorydevice is proposed. This nonvolatile memory device includes a memorylayer in which a plurality of memory cell array layers is stacked in aheight direction. In the memory cell array layer, nonvolatile memorycells, in each of which a rectifying element and a nonvolatile memoryelement such as a variable resistive element are connected in series,are arranged to be sandwiched at intersection positions of a pluralityof word lines and a plurality of bit lines formed at a height differentfrom the word lines. Moreover, peripheral circuits such as a columncontrol circuit that controls the bit lines of the memory cell arraylayer and performs access to a memory cell and a row control circuitthat selects a word line of the memory cell array layer and applies avoltage needed for access to the memory cell are provided at a lowerportion of the memory cell array layer above a semiconductor substrate.Therefore, the word lines and the bit lines drawn to a region out of amemory-cell forming region and the peripheral circuits are connected byword line contacts and bit line contacts that are provided to penetratethrough the memory layer (for example, see Japanese Patent ApplicationLaid-open No. 2009-130140).

As disclosed in Japanese Patent Application Laid-open No. 2009-130140,while the word line contact can be shared by a plurality of word linesformed at the same position in a plan view, the bit line contact isprovided to all of bit lines provided in the memory layer. Therefore, inthe three-dimensional cross-point type nonvolatile memory device, withthe increase of word lines and bit lines, many word line contacts andbit line contacts are needed, so that a problem arises in that an areaof a memory cell including the memory-cell forming region and a contactforming region in which the word line contacts and the bit line contactsare formed increases.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A and FIG. 1B are cross-sectional views schematically illustratingan example of a structure of a nonvolatile memory device;

FIG. 2 is a cross-sectional view schematically illustrating a structureof one memory cell illustrated in FIG. 1A and FIG. 1B;

FIG. 3A to FIG. 17D are diagrams schematically illustrating an exampleof a manufacturing method of the nonvolatile memory device;

FIG. 18 is a partial top view schematically illustrating an example of abit-line-contact forming region of the nonvolatile memory device;

FIG. 19A and FIG. 19B are diagrams schematically illustrating a state ofa contact portion of the nonvolatile memory device in a firstembodiment;

FIG. 20A to FIG. 20C are plan views schematically illustrating anexample of a procedure of the manufacturing method of the nonvolatilememory device in the first embodiment;

FIG. 21 is a cross-sectional view schematically illustrating an exampleof a procedure of the manufacturing method of the nonvolatile memorydevice in the first embodiment;

FIG. 22 illustrates a pattern of the bit-line-contact forming region bya typical method;

FIG. 23A and FIG. 23B are diagrams schematically illustrating a state ofa contact portion of a nonvolatile memory device in a second embodiment;

FIG. 24A to FIG. 24C are plan views schematically illustrating anexample of a procedure of a manufacturing method of the nonvolatilememory device in the second embodiment;

FIG. 25A to FIG. 28C are diagrams schematically illustrating an exampleof the manufacturing method of the nonvolatile memory device in thesecond embodiment; and

FIG. 29 is a cross-sectional view schematically illustrating a state ofa contact portion of a nonvolatile memory device in a third embodiment.

DETAILED DESCRIPTION

In general, according to one embodiment, a nonvolatile memory devicethat includes a peripheral circuit that includes a control element thatcontrols a nonvolatile memory cell formed above a substrate, a firstwire that is formed above the peripheral circuit via an inter-layerdielectric film and is connected to the control element, a memory layerin which a plurality of second wires and a plurality of third wires arearranged at intersection positions, contact plugs, and drawn wireportions. The second wires extend in a first direction and the thirdwires are formed at a height different from the second wires and extendin a second direction. The memory layer has a structure in which aplurality of memory-cell-array layers is stacked above the inter-layerdielectric film in which the first wire is formed. The memory-cell-arraylayer includes a plurality of nonvolatile memory cells each of whichincludes a nonvolatile memory element arranged at the intersectionpositions of the second wires and the third wires to be sandwichedbetween the second wires and the third wires. The contact plugs connectbetween the second wires and the first wire and between the third wiresand the first wire, and are formed in a peripheral portion of the memorylayer. The drawn wire portions connect the second wires and the thirdwires with the contact plugs in the memory layer. The drawn wire portionthat is connected to a second wire and a third wire other than a secondwire and a third wire of a bottom layer and a top layer of the memorylayer is formed of a wire with a critical dimension in the nonvolatilememory device same as the second wires and the third wires and is incontact with the contact plug on an upper surface and both side surfacesof the drawn wire portion.

A nonvolatile memory device and a manufacturing method thereof accordingto the embodiments will be explained below in detail with reference tothe accompanying drawings. The present invention is not limited to theseembodiments. The cross-sectional views of the nonvolatile memory deviceused in the following embodiments are schematic ones, and therelationship between a thickness and a width of a film, a ratio of athickness of respective films, and the like are different from realisticones. Moreover, a film thickness illustrated below is an example and isnot limited to this.

In the following, explanation is given for the case of manufacturing thenonvolatile memory device by applying a technology used in aconventional manufacturing process of a semiconductor device forminiaturization of the nonvolatile memory device, and the embodimentsare explained after pointing out problems thereof.

FIG. 1A and FIG. 1B are cross-sectional views schematically illustratingan example of a structure of the nonvolatile memory device, in whichFIG. 1A is a diagram schematically illustrating part of a cross sectionin a direction parallel to an extending direction of a word line andFIG. 1B is a diagram schematically illustrating part of a cross sectionin a direction vertical to the extending direction of a word line. FIG.2 is a cross-sectional view schematically illustrating a structure ofone memory cell illustrated in FIG. 1A and FIG. 1B.

As shown in FIG. 1A and FIG. 1B, a peripheral circuit that includes acell control transistor 12 that controls memory cells MC is formed abovea semiconductor substrate 10 such as a silicon substrate. The cellcontrol transistor 12 includes a gate electrode 14 that is formed on aregion on the surface of the semiconductor substrate 10 separated by anisolation dielectric film 11 via a gate dielectric film 13, and asource/drain region 15 that is formed on the surface of thesemiconductor substrate 10 on both sides of the gate electrode 14 in aline width direction. A first inter-layer dielectric film 20 is formedabove the semiconductor substrate 10 on which the cell controltransistor 12 is formed, and a lower-layer wire 25 is formed to beembedded in the inter-layer dielectric film 20 near the upper surface.The lower-layer wire 25 is connected to the source/drain region 15 ofthe cell control transistor 12 via a contact 21 formed in theinter-layer dielectric film 20. Moreover, a second inter-layerdielectric film 30 is formed above the inter-layer dielectric film 20,and on the second inter-layer dielectric film 30, a memory layer ML, andword line contacts WC1 and WC2 and bit line contacts BC1 and BC2 thatconnect word lines WL and bit lines BL connected to each memory cell MCof the memory layer ML to the lower-layer wires 25 connected to the cellcontrol transistor 12 are formed. A third inter-layer dielectric film 40is formed around each memory cell MC and around the word line contact WCand the bit line contact BC. For the contact, a hole portion is called acontact hole and a conductive portion in the contact hole is called acontact plug in the following in some cases.

The memory layer ML has a structure in which a plurality of memory-cellarray layers MA in each of which the memory cells MC are arranged in amatrix manner is stacked in a height direction. Each memory cell arraylayer MA has a structure in which a plurality of the word lines WLextending in an X direction and a plurality of the bit lines BLextending in a Y direction vertical to the X direction at a heightdifferent from the word lines WL are arranged intersecting with eachother, and a variable resistance memory cell (hereinafter, simplyreferred to as memory cell in some cases) MC in which a non-ohmicelement and a variable resistive element are connected in series isarranged at each intersection position. The word line WL or the bit lineBL is shared between the memory cells MC adjacent in the heightdirection. In the example in FIG. 1A and FIG. 1B, the case isillustrated in which four memory cell array layers MA are arranged inthe memory layer ML by three word lines WL1 to WL3 and two bit lines BL1and BL2.

As shown in FIG. 2, the memory cell MC has a structure in which a firstelectrode layer E1, a non-ohmic element NO, a second electrode layer E2,a variable resistive element RW, and a third electrode layer E3 arestacked in order. The electrode layer E1 has a function as an adhesionlayer and a barrier metal layer between the word line WL and thenon-ohmic element NO.

The non-ohmic element NO is provided for causing current flowing in thememory cell MC to flow in a predetermined direction (for example,direction from the word line WL to the bit line BL). Examples of thisnon-ohmic element NO include a PIN diode, a PN junction diode, aSchottky diode, and a MIM (Metal-Insulator-Metal) element. FIG. 2illustrates the case in which a PIN diode formed by stacking an N-typesemiconductor layer SN, an I-type semiconductor layer SI, and a P-typesemiconductor layer SP is used as the non-ohmic element NO.

The second electrode layer E2 has a function as an adhesion layer and abarrier metal layer between the non-ohmic element NO and the variableresistive element RW and a function as an electrode layer of thevariable resistive element RW. The variable resistive element RW isformed of a metal oxide capable of switching between a high resistancestate and a low resistance state by controlling a voltage value and anapplication time. An example of the variable resistive element RW is ametal oxide film that includes at least one of elements of Si, Ti, Ta,Nb, Hf, Zr, W, Al, Ni, Co, Mn, Fe, Cu, Mo, and the like. The thirdelectrode layer E3 has a function as an adhesion layer and a barriermetal layer between the variable resistive element RW and the bit lineBL and a function as an electrode layer of the variable resistiveelement RW.

The first, second, and third electrode layers E1, E2, and E3 are formedof the same material or materials with different combinations selectedfrom conductive materials such as Pt, Au, Ag, TiAlN, SrRuO, Ru, RuN, Ir,Co, Ti, TiN, TaN, LaNiO, Al, PtIrOX, PtRhOX, Rh, and TaAlN. Thecombination of the materials of each of the first, second, and thirdelectrode layers E1, E2, and E3 is appropriately selected from materialsused in the non-ohmic element NO and the variable resistive element RW.

Returning to FIG. 1A and FIG. 1B, the word lines WL1 to WL3 and the bitlines BL1 and BL2 of each memory cell array layer MA are formed toextend to word-line-contact forming regions RW and bit-line-contactforming regions RB adjacent to the formation position of the memory cellarray layer MA. As shown in FIG. 1A and FIG. 1B, the word lines WL1 toWL3 formed at the same position (at different heights) in a plan vieware connected to the common word line contacts WC1 and WC2 every otherlayer. In other words, the word lines WL1 and WL3 are connected to theword line contact WC1 in common and the word line WL2 is connected tothe word line contact WC2.

Moreover, the word line contacts WC1 and WC2 are both provided topenetrate through the third inter-layer dielectric film 40 for fourmemory cell array layers MA. The word line contact WC1 penetratesthrough the third inter-layer dielectric film 40 with approximately theconstant diameter, however, the word line contact WC2 is formed to havea first cross-sectional area up to the word line WL2 and partiallyoverlap with the word line WL2 drawn to the word-line-contact formingregion RW, and is formed to have a second cross-sectional area obtainedby subtracting the overlapping region from the first area on the lowerside of the connection portion with the word line WL2.

Furthermore, the word line contacts WC1 and WC2 are connected to alanding pad WL1 p at the lower ends thereof and are connected to alanding pad WL3 p to be a lid of the word line contacts WC1 and WC2 atthe upper ends thereof. The landing pads WL1 p and WL3 p connected tothe word line contact WC1 are formed to be connected to the word linesWL1 and WL3, respectively. Each of the word line contacts WC1 and WC2 isconnected to a driver via the landing pad WL1 p and the lower-layer wire25.

The bit lines BL1 and BL2 formed at the same position (at differentheights) in a plan view are connected to different bit-line contacts BC1and BC2, respectively. In other words, the bit line BL1 is connected tothe bit line contact BC1 and the bit line BL2 is connected to the bitline contact BC2. In the similar manner to the word line contacts WC1and WC2, the bit line contacts BC1 and BC2 are provided to penetratethrough the third inter-layer dielectric film 40 for four memory cellarray layers MA. The bit line contact BC1 is formed to have a firstcross-sectional area up to the bit line BL1 and partially overlap withthe bit line BL1, and is formed to have a second cross-sectional areaobtained by subtracting the overlapping region from the first area onthe lower side of the connection portion with the bit line BL1. In thesimilar manner, the bit line contact BC2 is formed to have a firstcross-sectional area up to the bit line BL2 and partially overlap withthe bit line BL2, and is formed to have a second cross-sectional areaobtained by subtracting the overlapping region from the first area onthe lower side of the connection portion with the bit line BL2.

Moreover, the lower end and the upper end of each of the bit linecontacts BC1 and BC2 are connected to the landing pads WL1 p and WL3 p,respectively. Each of the bit line contacts BC1 and BC2 is connected toa driver via the landing pad WL1 p and the lower-layer wire 25. Each ofthe bit line contacts BC1 and BC2 is connected to both drivers of anN-type MIS (Metal-Insulator-Semiconductor) transistor and a P-type MIStransistor. This is for selecting one of the memory cells MC connectedto the upper and lower sides of bit line BL by changing a polarity of avoltage applied to the word line WL and performing a reset process and aset process to be described later. In the following, a portion in whichpart of the word line contact WC is connected to the word line WL in anoverlapping manner and a portion in which part of the bit line contactBC is connected to the bit line BL in an overlapping manner are called adrawn wire portion.

FIG. 1A illustrates a cross section on a certain word-line formationposition, however, for all of other word lines WL1 to WL3 formed inparallel in a direction vertical to the paper surface, the word linecontacts WC1 and WC2 are provided in the similar manner and the wordlines are connected to the common word line contacts WC1 and WC2 everyother layer. FIG. 1B illustrates a cross section on a certain bit-lineformation position, however, for all of the bit lines BL1 and BL2 formedin parallel in a direction vertical to the paper surface, the bit linecontacts BC1 are BC2 are formed for every bit lines BL1 and BL2.

In FIG. 1A and FIG. 1B, the case is explained in which four memory cellarray layers MA are stacked, however, the structure is similar also inthe case of stacking a plurality of the memory cell array layers MA. Forexample, when eight memory cell array layers MA are stacked, four memorycell array layers MA are further stacked on the four memory cell arraylayers MA illustrated in FIG. 1A and FIG. 1B. In this case, the bit lineBL formed at the same position in a plan view is further increased bytwo, so that the bit line contact BC is also increased by two. The wordline WL formed at the same position in a plan view is increased by two,however, these word lines WL are formed alternately to the word linecontacts WC1 and WC2 as above, so that the number of the word linecontacts WC does not increase. Moreover, the word line contact WC andthe bit line contact BC corresponding to the second memory layer ML areformed on the formation positions of the word line contact WC and thebit line contact BC of the first memory layer ML, respectively.

In the nonvolatile memory device having such configuration, a voltageapplied to the word lines WL and the bit lines BL is controlled so thata predetermined voltage is applied to a target memory cell MC, therebychanging a resistance state of the variable resistive element RWconfiguring the memory cell MC. Specifically, a process of causingcurrent to flow in the variable resistive element RW in the lowresistance state and returning to a high resistance state in whichresistance is increased by one to two orders of magnitude by Joule heatis called a reset (erase) process and a process of returning to the lowresistance state by applying a voltage to the variable resistive elementin the high resistance state is called a set (write) process. In thismanner, the high resistance state and the low resistance state aregenerated by the reset process and the set process to store resistancevalue information, and a current difference flowing in the memory cellMC is detected, thereby functioning as a memory.

Next, the manufacturing method of the nonvolatile memory device of suchstructure is explained. In the nonvolatile memory device again, aminiaturization technology used for a semiconductor device,specifically, a sidewall processing process can be applied, and the caseis explained in which the sidewall processing process is applied forforming the memory cell array layer in the following. FIG. 3A to FIG.17D are diagrams schematically illustrating an example of themanufacturing method of the nonvolatile memory device, in which FIG. 3Ato FIG. 17A are plan views and FIG. 3B to FIG. 17B are A-A crosssectional views of FIG. 3A to FIG. 17A. FIG. 11C to FIG. 17C are B-Bcross sectional views of FIG. 11A to FIG. 17A, and FIG. 16D to FIG. 17Dare C-C cross sectional views of FIG. 16A to FIG. 17A.

First, an inter-layer dielectric film is formed above a semiconductorsubstrate such as a silicon substrate in which the peripheral circuitthat includes the cell control transistor 12 formed of a CMOS(Complementary Metal-Oxide-Semiconductor) transistor or the like isformed and is flattened. Then, the memory layer including the word linecontact and the bit line contact is formed on the flattened inter-layerdielectric film. In FIG. 3A to FIG. 17D, the semiconductor substrate,the peripheral circuit, and the inter-layer dielectric film formed abovea lower layer side of the memory layer are not shown.

Next, as shown in FIG. 3A and FIG. 3B, a wire material layer 101 to bethe word line WL1, a barrier metal film 104 such as TiN with a thicknessof, for example, 5 nm, a rectifying layer 105 that controls a directionof current that flows in the memory cell MC, a barrier metal film 106such as Ti/TiN with a thickness of, for example, 5 nm, a variableresistive layer 107 such as HfO with a thickness of, for example, 5 nm,and a cap film 108 such as W with a thickness of, for example, 50 nm,which functions as an upper portion electrode and as a stopper in theCMP (Chemical Mechanical Polishing) process, are formed in order on thenot-shown flattened inter-layer dielectric film by a film forming methodsuch as the PVD (Physical Vapor Deposition) method and the CVD (ChemicalVapor Deposition) method. The wire material layer 101 is composed of astacked film of a barrier metal film 102 such as WNX with a thicknessof, for example, 5 nm and a wiring layer 103 formed of W with athickness of, for example, 50 nm. The rectifying layer 105 is composedof an amorphous Si or the like with a thickness of, for example, 100 nm,in which an N-type semiconductor film 105N, an I-type semiconductor film105I, and a P-type semiconductor film 105P are stacked. This rectifyinglayer 105 functions as a non-ohmic element.

Moreover, on the cap film 108, a mask film 201 for wiring process suchas SiN with a thickness of, for example, 100 nm and a core film 202 as acore in performing slimming in a subsequent process, which is formed ofa TEOS (Tetraethoxysilane) film or the like with a thickness of, forexample, 100 nm, are formed by the film forming method such as the CVDmethod. Then, a resist 203 is applied to the core film 202, andpatterning is performed on the resist 203 by the lithography technologyto form patterns for wire formation having a pitch that is twice of thememory cell to be finally formed on the memory layer. When a finaltarget dimension is a half pitch F (for example, 20 nm), the width ofthe pattern for wire formation of the resist 203 is set to 2F (40 nm).The patterns for wire formation formed in a memory-cell forming regionare a line and space pattern in the X direction.

Next, as shown in FIG. 4A and FIG. 4B, the core film 202 is processedwith the resist 203 as a mask by an anisotropic etching such as the RIE(Reactive Ion Etching) method to form the patterns for wire formation.The half pitch of the pattern for wire formation at this time is 2F.Thereafter, the pattern for wire formation is slimmed by a wet etching,so that the half pitch (wire width) of the pattern for wire formationbecomes F. As the wet etching process, for example, an HF-based wetetching process by ammonium fluoride or the like can be performed.

Next, as shown in FIG. 5A and FIG. 5B, on the mask film 201 on which thepatterns for wire formation are formed, a spacer film 204 such asamorphous silicon is formed to have a thickness of the half pitch F bythe film forming method such as the CVD method. Thereafter, etch back isperformed to remove the spacer film 204 formed on the upper surfaces ofthe core film 202 and the mask film 201. Consequently, the spacer film204 having a width (for example, 20 nm) of the half pitch F is formedinto a ring shape (loop shape) surrounding the side surface of the corefilm 202.

Next, as shown in FIG. 6A and FIG. 6B, after forming a resist 205 in aregion including a not-shown word-line-contact forming region by thelithography technology, as shown in FIG. 7A and FIG. 7B, the core film202 in a resist opening region is removed by the wet etching process inwhich the resist 205 is used as a mask to leave only the spacer film204. As the wet etching process, for example, the HF-based wet etchingprocess can be performed. The shape patterned by the first formed resist203 remains in the region covered by the resist 205, and the ring-shaped(loop-shaped) spacer film 204 remains only in the outer periphery of thepattern formed by using the first resist 203 in the exposed region.

Next, as shown in FIG. 8A and FIG. 8B, after the resist 205 is removed,the mask film 201 is processed with the spacer film 204 and thenot-shown core film 202 as a mask. Consequently, thin-line patterns forwire formation having a desired pitch are formed in the memory-cellforming region and thick-line patterns for wire formation are formed inthe word-line-contact forming region and bit-line-contact formingregion, separately. In this stage, the thin-line patterns for wireformation are all formed into a ring shape, so that an operation ofdividing them into lines is performed. Although not shown here, afterapplying resist and patterning the resist so that, for example, theloop-shaped pattern for wire formation is open near both end portions inthe word line direction (X direction) by the lithography technology, themask film 201 is processed with this resist as a mask. Consequently, aline and space pattern having a desired pitch is formed.

Next, as shown in FIG. 9A and FIG. 9B, layers from the cap film 108 tothe wire material layer 101 are sequentially processed with the maskfilm 201 patterned into a desired shape as a mask. Consequently, in thememory-cell forming region, line and space shaped patterns that extendin the X direction are formed and the wire material layer 101 becomesthe word line WL1. Next, as shown in FIG. 10A and FIG. 10B, acoating-type dielectric film such as polysilazane is embedded betweenthe line and space shaped patterns to form the third inter-layerdielectric film 40. Thereafter, the third inter-layer dielectric film 40is flattened by the CMP method with the cap film 108 as a stopper.Consequently, the upper surface of the cap film 108 is exposed.

Next, as shown in FIG. 11A to FIG. 11C, on the third inter-layerdielectric film 40 in which the cap film 108 is exposed, a wire materiallayer 111 to be the bit line BL1 in which a barrier metal film 112 and awiring layer 113 are stacked, a barrier metal film 114, a rectifyinglayer 115, a barrier metal film 116, a variable resistive layer 117, anda cap film 118 are formed in order by the film forming method such asthe PVD method and the CDV method. These films can be formed, forexample, with the material and the film thickness similar to the wirematerial layer 101 to the cap film 108 formed in the lower layer. Inthis example, because current is caused to flow in a direction from thebit line BL to the word line WL, the stacking order in the PIN structureof the rectifying layer 115 is opposite to the stacking order in the PINstructure of the rectifying layer 105 of the lower layer, and therectifying layer 115 has a structure in which a P-type semiconductorfilm 115P, an I-type semiconductor film 115I, and an N-typesemiconductor film 115N are stacked in order.

Moreover, a mask film 211 and a core film 212 are formed on the cap film118 by the film forming method such as the CVD method. These films canalso be formed, for example, with the material and the film thicknesssimilar to the mask film 201 and the core film 202 formed in the lowerlayer. Then, a resist 213 is applied to the core film 212, andpatterning is performed on the resist 213 by the lithography technologyto form patterns for wire formation having a pitch that is twice of thememory element to be finally formed on the memory layer. The patternsfor wire formation become a line and space pattern in a direction (Ydirection) orthogonal to an extending direction (X direction) of theearlier-formed word line WL. Moreover, in the bit-line-contact formingregion, a drawn-wire-portion forming pattern 150 a is formed which is anapproximately L-shaped pattern connected to the line and space patternextending from the memory-cell forming region.

Next, after the core film 212 is processed by the anisotropic etchingsuch as the RIE method with the resist 213 as a mask to form thepatterns for wire formation whose half pitch (wire width) is 2F, thepatterns for wire formation are slimmed so that the half pitch (wirewidth) becomes F. Thereafter, as shown in FIG. 12A to FIG. 12C, a spacerfilm 214 formed of amorphous silicon or the like is formed around theline and space shaped core film 212 to have a thickness equal to thehalf pitch F.

Thereafter, as shown in FIG. 13A to FIG. 13C, a resist 215 is formed inthe bit-line-contact forming region, the core film 212 in a resistopening region is removed by the wet etching process in which the resist215 is used as a mask to leave only the spacer film 214. As the wetetching process, for example, the HF-based wet etching process can beperformed. At this time, because of the isotropic etchingcharacteristics of an etching liquid EL, the etching liquid ELpenetrates from a resist boundary formed in the bit-line-contact formingregion and part of the core film 212 under the resist 215 is etched.

Next, as shown in FIG. 14A to FIG. 14C, after the resist 215 is removed,the mask film 211 is processed with the spacer film 214 and the corefilm 212 as a mask. Consequently, the patterns for wire formation havinga wire width of a minimum pitch are formed in the memory-cell formingregion (region that was not covered with the resist 215) in which aprocess mask is formed only by the spacer film 214 and the pattern forwire formation having a width wider than the minimum pitch is formed inthe bit-line-contact forming region in which a mask is formed by thespacer film 214 and the core film 212.

At this time, in the similar manner to FIG. 8A and FIG. 8B, the patternfor wire formation having a minimum wire width that is formed with thespacer film 214 as a mask becomes a ring shape (loop shape), so that anoperation is performed to divide two patterns for wire formationconnected in a ring shape. Therefore, a resist 216 is applied to the capfilm 118 on which the patterned mask film 211 is formed, and, forexample, an opening 216 a is formed only at a dividing portion such asnear both end portions of the loop-shaped patterns for wire formation inthe bit line direction (Y direction). Then, as shown in FIG. 15A to FIG.15C, the mask film 211 is etched with the resist 216 as a mask.Thereafter, the resist 216 is removed.

Next, as shown in FIG. 16A to FIG. 16D, layers from the cap film 118 tothe barrier metal film 104 are sequentially processed with the mask film211 as a mask. Consequently, in the memory-cell forming region, a lineand space shaped pattern having the minimum pitch that extends in the Ydirection is formed. As a result, the wire material layer 111 becomesthe bit line BL1 and the memory cell MC patterned into a pillar-shapedstructure in which a stacked film from the barrier metal film 104 to thecap film 108 is defined by the width of the word line WL1 and the widthof the bit line BL1 is formed between the word line WL1 and the bit lineBL1. Moreover, in the bit-line-contact forming region, layers from thecap film 118 to the barrier metal film 104 are processed in accordancewith the pattern of the mask film 211. Consequently, a first memory cellarray layer MA is formed. Moreover, in the word-line-contact formingregion and the bit-line-contact forming region, a pad-shaped drawn wireportion 150 is formed.

Thereafter, as shown in FIG. 17A to FIG. 17D, a coating-type dielectricfilm such as polysilazane is embedded between the line and space shapedpatterns to form the third inter-layer dielectric film 40. Then, thethird inter-layer dielectric film 40 is flattened by the CMP method withthe cap film 118 as a stopper. Consequently, the upper surface of thecap film 118 is exposed.

Thereafter, the procedure similar to the above method is repeated toform second to fourth memory cell array layers MA. After the fourthmemory cell array layer MA is formed, a contact hole is formed whichcommunicates with the formation position of the landing pad WL1 p in theword-line-contact forming region and the bit-line-contact forming regionby the lithography technology and the etching technology. At this time,as shown in FIG. 1A, the word line WL2 covers part of the contact-holeformation position of the word line contact WC2, so that the contacthole is formed in a portion excluding the formation region of the wordline WL2 from the contact hole of the word line contact WC2 in a depthequal to or lower than the word line WL2. The contact holes are formedin the bit line contacts BC1 and BC2 in FIG. 1B in the similar manner.Then, after forming a barrier metal film such as TiN with a thicknessof, for example, 10 nm on the inner surface of the contact holes of theword line contacts WC1 and WC2 and the bit line contacts BC1 and BC2,and moreover, filling a conductive material such as W, the barrier metalfilm and the conductive material formed above the third inter-layerdielectric film 40 are removed by the CMP method or the like to beflattened. Thereafter, the word line (WL3) that is the top layer wire isformed on the third inter-layer dielectric film 40 and the landing padWL3 p is formed with Al or the like on the formation positions of theword line contacts WC1 and WC2 and the bit line contacts BC1 and BC2,thereby completing the nonvolatile memory device shown in FIG. 1A andFIG. 1B.

FIG. 18 is a partial top view schematically illustrating an example ofthe bit-line-contact forming regions of the nonvolatile memory device.FIG. 18 illustrates an example of the bit-line-contact forming regionsRB on the plane (wiring layer) on which the bit lines BL1 are formed. Asshown in FIG. 18, the drawn wire portion 150 connected to a bit lineBL104 is formed in a bit-line-contact forming region R104, and the drawnwire portion 150 connected to a bit line BL103 is formed in abit-line-contact forming region R103. As described above, two bit linecontacts BC1 and BC2 are formed in one bit-line-contact forming regionRB, and bottom portions of the bit line contacts BC1 and BC2 areconnected to landing pads WL1 p-1 and WL1 p-2. The drawn wire portion150 connected to the bit line contact BC1 is formed to position on thelanding pad WL1 p-1. Moreover, although not shown, an approximatelyL-shaped drawn wire portion 150 is formed to be arranged at theformation position of the bit line contact BC2 in the upper layer inwhich the bit line BL2 is formed in the similar manner.

Although not shown here, the bit-line-contact forming regions RB of bitlines BL101 and BL102 are provided in a not-shown region that extends ina right direction in the paper surface beyond a bit-line-contact formingregion R103. Moreover, the bit-line-contact forming regions RB of bitlines BL105 to BL112 are provided in a not-shown region in a leftdirection in the paper surface beyond the memory-cell forming region. Inthis manner, the bit-line-contact forming region RB is providedalternately in the right and left direction with respect to thememory-cell forming region with a predetermined number of the bit linesBL as a unit. In FIG. 4, the bit-line-contact forming region RB isexplained, however, the word-line-contact forming region RW has anapproximately the same structure.

In the above manufacturing method of the nonvolatile memory device,exposure needs to be performed three times for forming one layer ofwiring in the following processes.

(1) typical forming process of a resist pattern

(2) process of separately forming a line formed with a minimum halfpitch in the memory-cell forming region and a pattern wider than theminimum half pitch in the word-line-contact forming region RW, thebit-line-contact forming region RB, and the like

(3) process of dividing a pattern that is formed into a loop shape (ringshape)

Specially, in the three-dimensional cross-point type memory, the numberof times of exposure is tripled for the number of layers to be formed,so that a problem arises in that the process cost increases.

Moreover, as explained in FIG. 13A to FIG. 13C, in separately forming apattern between the memory-cell forming region and the bit-line-contactforming region RB and the like therearound, when the core film 212 isselectively removed by the wet etching process, there is a problem inthat part of the core film 212 covered with the resist 215 in thebit-line-contact forming region is also etched. Therefore, the dimensionof the drawn wire portion 150 in the bit line direction (Y direction)needs to be extended excessively by about 0.3 to 0.4 for avoidingremoval of the whole core film 212 forming the drawn wire portion 150.

Furthermore, as shown in FIG. 1A, FIG. 1B, or FIG. 18, in thethree-dimensional cross-point type nonvolatile memory device, the wordline contacts WC1 and WC2 are arranged to be aligned approximately onthe extended line of the word lines WL1 to WL3 to be connected, and thebit line contacts BC1 and BC2 are also arranged to be alignedapproximately on the extended line of the bit lines BL1 and BL2 to beconnected. FIG. 1A and FIG. 1B illustrate the case where only two layersof the bit lines BL are formed in the height direction when four memorycell array layers MA are formed. When the memory cell array layer MA isfurther stacked, the number of the bit lines BL increases and the numberof the bit line contacts BC also increases corresponding thereto. Inthis case, the bit line contact BC is formed by the number of the bitlines BL stacked in the height direction in the right and left directionin the bit-line-contact forming region RB (for example, bit-line-contactforming regions R103 and R104) in FIG. 18. In this manner, when thenumber of the stacked memory cell array layers MA increases, the bitline contact BC needs to be ensured by the number of the layers of thebit lines BL included therein, so that the area of the bit-line-contactforming region RB increases by that amount. The increase of the areaoccurs in all of the bit-line-contact forming regions RB, so that thememory cell area increases largely in the whole nonvolatile memorydevice.

Moreover, in the three-dimensional cross-point type nonvolatile memorydevice such as a resistance change memory, the structure is such thatthe memory cell array is divided into small sizes compared to theNAND-type flash memory and the drawn portion is provided to each dividedmemory cell array to be driven separately. In the resistance changememory, the structure is such that the variable resistive element andthe rectifying element are connected in series, so that if many memorycells MC are connected to one wire, leakage current as a total ofoff-leakage currents of the rectifying elements increases even in thestate where a reverse voltage is applied to the rectifying elements. Inorder to prevent increase of this leakage current, the memory cell arrayis divided into small sizes as described above. In other words, in theresistance change memory, the number of the drawn wire portions 150present is proportional to “number of stacked wires □ number ofdivisions of memory cell array”, so that even if the length of oneportion of the word line contact WC or the bit line contact BC isincreased by about 0.3 □m in the word line direction or the bit linedirection, the area increases significantly as a whole, so that impacton the chip area is large and the cost increase arises as a problem.Moreover, when the number of the drawn wire portions 150 increases, adummy region arrangement for preventing dishing in the CMP process isneeded, which results in further increase of a ratio of theword-line-contact forming region RW and the bit-line-contact formingregion RB with respect to the memory-cell forming region.

Explanation is given for the nonvolatile memory device and themanufacturing method thereof in which when forming wires of the memorycell array layer MA with the minimum half pitch by using the sidewallprocessing process, a connection region (contact forming region) of awire extending from the memory cell MC and a driver can be reducedcompared to the conventional technology. Moreover, explanation is alsogiven for the manufacturing method of the nonvolatile memory devicecapable of reducing the number of times of exposure compared to theconventional technology.

First Embodiment

FIG. 19A and FIG. 19B are diagrams schematically illustrating a state ofa contact portion of the nonvolatile memory device in the firstembodiment, in which FIG. 19A is a plan view at a position at which thebit lines BL1 are formed and FIG. 19B is a D-D cross-sectional view ofFIG. 19A. FIG. 19A and FIG. 19B illustrate only one bit line contact BC1for convenience sake of explanation. Moreover, the configuration of thememory layer of this nonvolatile memory device is similar to that shownin FIG. 1A and FIG. 1B, so that explanation thereof is omitted.Furthermore, a contact plug in claims corresponds to the word linecontact WC and the bit line contact BC.

As described above, in the memory cell array layer MA, wires are formedwith the minimum half pitch, and the word line WL and the bit line BLconnected to each memory cell MC of the memory cell array layer MA areformed to extend to the word-line-contact forming region and thebit-line-contact forming region to be connected to correspondingdrivers, respectively. In the first embodiment, as shown in FIG. 19A,the bit line BL1 has a structure to be formed with a width of theminimum half pitch up to the bit-line-contact forming region RB.Moreover, as shown in FIG. 19B, the bit line contact BC1 is providedstraddling a drawn wire portion 151 having a width of the minimum halfpitch. In other words, in the bit-line-contact forming region RB, thedrawn wire portion 151 has a structure to be connected to the bit linecontact BC on the upper surface and the both side surfaces thereof. Inthis example, the landing pads WL1 p and WL3 p corresponding to thebottom layer wire (the word line WL1) and the top layer wire (the wordline WL3) have a structure similar to those in the above typical method.Moreover, in this example, the bit line contact BC1 is explained,however, the drawn wire portion and the word line contact in theword-line-contact forming region also have the similar structure.

FIG. 20A to FIG. 20C are plan views schematically illustrating anexample of a procedure of the manufacturing method of the nonvolatilememory device in the first embodiment, and FIG. 21 is a cross-sectionalview schematically illustrating an example of a procedure of themanufacturing method of the nonvolatile memory device in the firstembodiment. In this example, only a portion different from themanufacturing method of the nonvolatile memory device explained in FIG.3A to FIG. 17D is explained. Moreover, in this example, a forming methodof the bit line contact is explained, however, a forming method of theword line contact is similar.

When patterning the resist 213 to form the patterns for wire formation,in the above typical method, as shown in FIG. 11A, the L-shaped pattern150 a is formed as the pattern for drawn wire formation in thebit-line-contact forming region RB to be connected to each pattern forbit line formation. However, in the first embodiment, as shown in FIG.20A, a rectangular pattern 213 a is formed to be connected to eachbit-line forming pattern 213 b. This rectangular pattern 213 a is formedto cover part of the landing pad WLpl formed at the height at which theword line WL1 is formed.

FIG. 22 illustrates a pattern of the bit-line-contact forming region bya typical method. As explained in FIG. 13A to 13C, in the typicalmethod, in the subsequent removing process of the core film 212 by thewet etching, because part of a portion covered with the resist 213 isalso removed, a pattern 213 c in which excess dimension is added in thebit line BL direction is formed so that the portion is not completelyremoved in the etching process time. Compared to a width W2 in the bitline BL direction necessary for forming this drawn wire portion, in thefirst embodiment shown in FIG. 20A, a width W1 in the bit line BLdirection is significantly reduced. This is because, in the firstembodiment, the drawn wire portion 151 is configured to have the samewire width as the word line WL and the bit line BL and the drawn wireportion 151 is only arranged across the landing pad WL1 p.

Next, the core film 212 is etched by using the resist 213 in which thepatterns are formed, and is slimmed so that the width of the pattern forwire formation in a memory-cell forming region RM becomes a target halfpitch. Thereafter, the spacer film 214 is formed around the core film212. At this time, as shown in FIG. 20B, the spacer film 214 is formedalso around a core film 212 a of the wire drawn portion so that thethickness (width) becomes the minimum half pitch.

Thereafter, as shown in FIG. 20C, the core film 212 is removed by thewet etching process to leave only the spacer film 214. At this time, thespacer film 214 with the minimum half pitch is left along the peripheryof the core film 212 a that is processed into a rectangular shape, nearthe formation position of the bit line contact BC1. Then, one pattern214 a of the two patterns orthogonal to the bit line BL direction isformed across the formation position of the landing pad WL1 p formed inthe lower layer. In this manner, the patterns for wire formation areformed.

In the typical method, as shown in FIG. 13A to FIG. 13C, the exposureprocess is performed to leave the resist 215 on the formation positionof the drawn wire portion 150, however, in the first embodiment, thecore film 212 a of the drawn wire portion is all removed, so that thereis no need to perform a process of forming a resist and exposing theresist.

Thereafter, a process similar to the process illustrated in FIG. 14A toFIG. 14C and the following drawings is performed. Specifically, afterperforming a process of processing the mask film 211 with the spacerfilm 214 as a mask and dividing the patterns for wire formation formedinto a ring shape (loop shape) in the memory-cell forming region RM intothe bit lines BL, layers from the cap film 118 to the barrier metal film104 are sequentially processed with the mask film 211 as a mask. Next,the third inter-layer dielectric film 40 is embedded between line andspace shaped patterns, and is flattened by the CMP method with the capfilm 118 as a stopper. Thereafter, the similar process is repeated toform four memory cell array layers MA.

Next, as shown in FIG. 21, a contact hole 160 is formed whichcommunicates with the formation position of the landing pad WL1 p in thebit-line-contact forming region RB (word-line-contact forming region) bythe lithography technology and the etching technology. At the formationposition of the contact hole 160 of the bit line contact BC1, part ofthe drawn wire portion 151 connected to the bit line BL1 is formedacross approximately the center of the landing pad WL1 p in the bit lineBL1 direction in a direction vertical to the bit line BL1. Therefore,the contact hole 160 in the depth equal to or lower than this bit lineBL1 is a portion excluding a region overlapping the drawn wire portion151 from the contact hole 160 at the position higher than the bit lineBL1. Then, a barrier metal film or a conductive material is filled inthe inner surface side of the contact hole 160 to form the bit linecontact BC1. Other word line contacts WC1 and WC2, bit line contact BC2,and the like are formed in the similar manner. Thereafter, the word line(WL3) that is the top layer wire is formed on the third inter-layerdielectric film 40 and the landing pad WL3 p is formed with Al or thelike on the formation positions of the word line contacts WC1 and WC2and the bit line contacts BC1 and BC2, thereby completing thenonvolatile memory device shown in FIG. 19A and FIG. 19B.

In the first embodiment, the word line WL and the bit line BL connectedto the memory cell MC are extended to the word-line-contact formingregion and the bit-line-contact forming region while keeping a width ofthe minimum half pitch to form the drawn wire portion 151, and the wordline contact WC and the bit line contact BC are formed straddling thisdrawn wire portion 151. Consequently, the formation area of the drawnwire portion 151 can be made small compared to the case of processingthe drawn wire portion 150 into a pad shape. In other words, the corefilm 212 does not need to be left at the pattern formation of the drawnwire portion 151, so that there is no need to increase the dimensiontaking into consideration the removal of the core film 212 of the drawnwire portion 150 by the etching liquid in the removing process of thecore film 212. As a result, an effect is obtained that the formationarea of the drawn wire portion 151 can be reduced and the whole area ofthe memory cell of the nonvolatile memory device can be reduced.Moreover, the core film 212 does not need to be left at the patternformation of the drawn wire portion 151, so that a mask does not need tobe formed on the drawn wire portion 151 at the removal of the core film212 and thus an effect is obtained that the lithography process can bereduced compared to the typical method.

Second Embodiment

In the first embodiment, for example, as shown in FIG. 19A and FIG. 19B,for the top and bottom wires in the memory layer, i.e., the word linesWL1 and WL3, the landing pads WL1 p and WL3 p are formed by the methodillustrated in FIG. 3A to FIG. 17D at the formation position of each ofthe word line contact WC and the bit line contact BC. On the other hand,the drawn wire portions 151 corresponding to the word line WL2 and thebit lines BL1 and BL2 sandwiched between these wires (the word lines WL1and WL3) are formed by the method illustrated in FIG. 20A to FIG. 21. Inother words, at the formation of the drawn wire portion 151, it isneeded to apply the process of separately forming a pattern between acase of forming a plate-shaped pattern and a case of forming a wirepattern with a width of the minimum half pitch depending on a layer. Asa result, the number of processes is reduced only for part of the wiringlayers. Thus, in the second embodiment, the case is explained in whichthe drawn wire portion 151 is formed with the wire pattern with a widthof the minimum half pitch for all of the wiring layers of the memorylayer.

FIG. 23A and FIG. 23B are diagrams schematically illustrating a state ofthe contact portion of the nonvolatile memory device in the secondembodiment, in which FIG. 23A is a plan view at a position at which thebit lines BL1 are formed and FIG. 23B is an E-E cross-sectional view ofFIG. 23A. In this example, only one bit line contact BC1 is illustratedfor convenience sake of explanation. Moreover, components that are thesame as those described above are given the same reference numerals andexplanation thereof is omitted.

In the second embodiment, a wire in the bottom layer, i.e., the landingpad WL1 p formed in the wiring layer same as the word line WL1 has astructure in which a plurality of loop-shaped patterns, each of which isformed by connecting both end portions of two lines extending in theword line direction, is arranged in the bit line direction. The halfpitch of the line portion extending in the word line direction is theminimum half pitch in the similar manner to a wire of the memory cellarray layer. In FIG. 23B, the landing pad WL3 p on the upper end side ofthe bit line contact BC1 is also formed into loop-shaped patterns in thesimilar manner to the landing pad WL1 p, however, can be arectangular-shaped pattern. The bit line contact BC1 is explained inthis example, however, the landing pads WL1 p and WL3 p in theword-line-contact forming region also have the similar structure.

FIG. 24A to FIG. 24C are plan views schematically illustrating anexample of a procedure of the manufacturing method of the nonvolatilememory device in the second embodiment. FIG. 25A to FIG. 28C arediagrams schematically illustrating an example of the manufacturingmethod of the nonvolatile memory device in the second embodiment, inwhich FIG. 25A to FIG. 28A are plan views, FIG. 25B to FIG. 28B are F-Fcross-sectional views of FIG. 25A to FIG. 28A, and FIG. 28C illustratesanother example of the F-F cross-sectional view of FIG. 28A. First, whenpatterning the resist 203 in FIG. 3A and FIG. 3B, as shown in FIG. 24A,line and space shaped patterns 203 a are formed also at the formationposition of the landing pad WL1 p of each of the word line contact WCand the bit line contact BC in the word-line-contact forming region andthe bit-line-contact forming region. These patterns 203 a are arrangedwith predetermined intervals in the bit line direction, for example, inan area approximately the same as the landing pad WL1 p in FIG. 19A andFIG. 19B.

Next, with the procedure illustrated in FIG. 4A to FIG. 6B, the corefilm 202 is processed by using the resist 203 in which the patterns areformed to be slimmed so that the line and space shaped pattern has apredetermined dimension (for example, minimum half pitch). Thereafter,as shown in FIG. 24B, the spacer film 204 is formed around the core film202.

Next, as shown in FIG. 24C, the core film 202 is removed by the wetetching process to leave only the spacer film 204. At this time, in thememory-cell forming region RM and the bit-line-contact forming regionRB, the loop-shaped patterns formed of the spacer film 204 are left.Although not shown, the loop-shaped patterns are formed in the similarmanner in the word-line-contact forming region.

Then, as shown in FIG. 8A to FIG. 9B, after performing the process ofprocessing the mask film 201 with this loop-shaped spacer film 204 as amask and dividing the loop-shaped pattern for wire formation in thememory-cell forming region into the word lines WL, layers from the capfilm 108 to the wire material layer 101 are sequentially processed withthe mask film 201 as a mask, and the third inter-layer dielectric film40 is embedded between the processed stacked films.

Thereafter, in the similar manner to the process shown in FIG. 20A toFIG. 20C, layers from the barrier metal film 112 to the core film 212are stacked on the third inter-layer dielectric film 40 in the statewhere the cap film 108 is exposed, and the patterns for wire formationhaving the minimum half pitch for forming the bit lines BL1 are formedon the mask film 211.

Next, as shown in FIG. 25A, after collectively processing layers fromthe cap film 118 to the barrier metal film 104 with the mask film 211,the third inter-layer dielectric film 40 is embedded between theprocessed patterns. Then, the process as above is repeated to stack aplurality of memory cell array layers. Thereafter, as shown in FIG. 26Aand FIG. 26B, a resist 221 is applied to the third inter-layerdielectric film 40 and patterning is performed so that an opening 221 ais formed in the formation positions of the word line contact WC and thebit line contact BC. At this time, the memory-cell forming region iscovered with the resist 221.

Next, as shown in FIG. 27A and FIG. 27B, the third inter-layerdielectric film 40 is processed with the resist 221 as a mask to formthe contact hole 160. At this time, when the drawn wire portion 151 isprovided at the formation position of the contact hole 160, the drawnwire portion 151 functions as a mask and this portion is not etched, anda portion other than the formation region of the drawn wire portion 151in the contact hole 160 is etched. Etching of this contact hole 160 isperformed until reaching the landing pad WL1 p. Thereafter, a conductivematerial is embedded in the contact hole 160 to form the word linecontact WC and the bit line contact BC1.

Next, as shown in FIG. 28A to FIG. 28C, the landing pad WL3 p that isconnected to the upper layer wire is formed on the formation positionsof the word line contact WC and the bit line contact BC1. As shown inFIG. 28B, this landing pad WL3 p can be formed by arranging a pluralityof loop-shaped patterns with a predetermined size same as the landingpad WL1 p, or, as shown in FIG. 28C, the landing pad WL3 p can be formedby arranging a rectangular pattern with an area wider than the contacthole 160. The upper layer wire is connected to the peripheral circuitvia this landing pad WL3 p.

In this manner, the landing pad WL1 p formed at a height at which theword line WL1 is arranged becomes the ring-shape wire, and the word linecontact WC or the bit line contact BC is connected to the upper surfaceand the side surface of this ring-shaped wire. When the landing pad WL1p is the ring-shaped wire, the inter-layer dielectric film in the ringgap may be etched and come into contact with the lower-layer wire 25 ofthe peripheral circuit (CMOS region) present in further lower layer byoveretching at the contact hole processing. However, the gap of thering-shaped wire has a critical dimension and therefore has a highaspect ratio at the processing, so that etching stop occurs. Therefore,there is a little possibility that the contact hole reaches the lowerportion and the word line contact WC or the bit line contact BC comesinto contact with the lower-layer wire 25. For eliminating suchconcerns, etching can be caused to stop by forming an etching stopperfilm, such as SiN, between the word line WL1 and the lower-layer wire 25as needed.

In the second embodiment, the landing pads WL1 p and WL3 p are alsoformed with a plurality of ring-shaped wires having a width of theminimum half pitch. Consequently, there is no need to separately formthe landing pads WL1 p and WL3 p or the drawn wire portions 151connected to the word line contact WC and the bit line contact BC foreach memory cell array layer between the case of forming it into aplate-shaped pattern and the case of forming it into a wiring patternwith a width of the minimum half pitch. As a result, the number ofprocesses can be further reduced compared to the case of the firstembodiment.

Third Embodiment

FIG. 29 is a cross-sectional view schematically illustrating a state ofa contact portion of a nonvolatile memory device in the thirdembodiment. In this example, only one bit line contact BC1 isillustrated for convenience sake of explanation. Moreover, componentsthat are the same as those described above are given the same referencenumerals and explanation thereof is omitted.

As shown in FIG. 29, in the third embodiment, the landing pad WL1 pcorresponding to the height at which the word line WL1 is formed is notprovided to the bit line contact BC1, a contact hole 161 is providedwhich reaches the lower-layer wire 25 directly connected to an elementconfiguring the peripheral circuit formed on a not-shown semiconductorsubstrate, and a conductive material is embedded in this contact hole161, to form the bit line contact BC1. The word line contact WC2 and thebit line contact BC2 other than the word line contact WC1 have thesimilar structure.

In the second embodiment illustrated in FIGS. 23A and 23B, the landingpad WL1 p at the bottom of the word line contact WC and the bit linecontact BC has a ring shape and the word line contact WC and the bitline contact BC may penetrate through the landing pad WL1 p, however, inthe third embodiment, as shown in FIG. 29, the layout is such that aconnection portion at a contact bottom hooked on the upper portion wire(in this example, the bit line BL1) is directly dropped on thelower-layer wire 25 instead of the landing pad WL1 p. Therefore, it ispossible to prevent short-circuit with the lower-layer wire 25 due tothe penetration of the contact.

For the word line WL1 of the bottom layer, it is possible to omit thelanding pad WL1 p and directly drop the word line contact WC and the bitline contact BC on the lower-layer wire 25, however, for the upperportion wires such as the word line WL3, the landing pad WL3 p thereofcannot be omitted. This is because if the landing pad WL3 p thereof isomitted, the word line WL3 and the word line contact WC1 cannot beconnected. However, for example, when a plurality of the memory layersML each including four memory cell array layers MA in FIG. 1A and FIG.1B is stacked, the word line contact WC and the bit line contact BC ofthe memory layer ML of the upper layer are arranged just under the wordline contact WC and the bit line contact BC of the memory layer ML ofthe lower layer, so that the landing pads WL3 p on the bottom of theword line contact WC and the bit line contact BC of the memory layer ofthe upper layer can have a ring shape in the similar manner to thesecond embodiment. This is because even if penetration due tooveretching of the upper portion contact occurs, upper and lowercontacts have a series structure, so that there is no problem inelectrical characteristics.

According to the third embodiment, even if the process of separatelyforming a wide wire for all wiring layers is omitted and the connectionportion with the contact is formed into a line with the criticaldimension, an effect is obtained that decrease in yield due toshort-circuit with the lower-layer wire 25 because of overetching of thecontact can be suppressed.

In the above explanation, explanation is given with the variableresistance memory as an example as the nonvolatile memory, however, theabove embodiments can also be applied to a pad portion of a contact of athree-dimensional cross-point type memory such as a phase change memory,a drawn portion of a control gate electrode of a NAND-type flash memory,and the like.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions.

1. A nonvolatile memory device comprising: a peripheral circuit thatincludes a control element that controls a nonvolatile memory cellformed above a substrate; a first wire that is formed above theperipheral circuit via an inter-layer dielectric film and is connectedto the control element; a memory layer in which a plurality ofmemory-cell-array layers is stacked on the inter-layer dielectric filmin which the first wire is formed, each of the memory-cell-array layersincluding a plurality of nonvolatile memory cells each of which includesa nonvolatile memory element arranged at intersection positions of aplurality of second wires that extend in a first direction and aplurality of third wires that are formed at a height different from thesecond wires and extend in a second direction, the nonvolatile memoryelement being sandwiched between the second wires and the third wires;contact plugs that connect between the second wires and the first wireand between the third wires and the first wire, and are formed in aperipheral portion of the memory layer; and drawn wire portions thatconnect the second wires and the third wires with the contact plugs inthe memory layer, wherein the drawn wire portion that is connected to asecond wire and a third wire other than a second wire and a third wireof a bottom layer and a top layer of the memory layer is formed of awire with a critical dimension in the nonvolatile memory device same asthe second wires and the third wires and is in contact with the contactplug on an upper surface and both side surfaces of the drawn wireportion.
 2. The nonvolatile memory device according to claim 1, whereinthe drawn wire portion is routed in a U shape to come into contact withthe contact plug, in a direction orthogonal to the second wire or thethird wire from the second wire or the third wire.
 3. The nonvolatilememory device according to claim 1, wherein a lower end of the contactplug is connected to a pad of the bottom layer of the memory layer, andthe pad includes a plurality of loop-shaped wires having a width of thecritical dimension same as the second wires and the third wires.
 4. Thenonvolatile memory device according to claim 3, wherein each of theloop-shaped wires includes straight line portions that extend in adirection vertical to an extending direction of the second wires or thethird wires and a connection portion that connects both ends of a pairof adjacent straight line portions, and the straight line portions arearranged in a direction vertical to an extending direction of thestraight line portions with a wire width of the critical dimension as ahalf pitch.
 5. The nonvolatile memory device according to claim 1,wherein a lower end of the contact plug is connected to the first wirewithout a pad of the bottom layer of the memory layer.
 6. Thenonvolatile memory device according to claim 1, wherein the memory layerincludes a plurality of memory layers, and the contact plug of a memorylayer other than a bottom layer is provided to correspond to a contactformation position of a memory layer on a lower layer side of the memorylayer.
 7. The nonvolatile memory device according to claim 1, whereinthe second wires are connected to a same contact plug every other memorylayer.
 8. The nonvolatile memory device according to claim 1, whereinthe nonvolatile memory element is a variable resistive element or aphase change memory.
 9. A method of manufacturing a nonvolatile memorydevice comprising: stacking a first wiring layer, a first stacked filmincluding a nonvolatile storage layer, and a first core film in order;processing the first core film in a memory-cell forming region into aline and space shaped pattern whose half pitch is 2F and which extendsin a predetermined direction; slimming the first core film into a lineand space shaped pattern whose half pitch is F; forming a loop-shapedfirst spacer film whose thickness is F around the pattern of the firstcore film; removing the first core film; forming a line and space shapedfirst pattern for wire formation by removing part of the loop-shapedfirst spacer film; forming a line and space shaped pattern in thememory-cell forming region and forming a pad-shaped pattern in a contactforming region, by processing the first stacked film and the firstwiring layer with the first pattern for wire formation as a mask;embedding an inter-layer dielectric film between processed patterns;forming a second wiring layer, a second stacked film including anonvolatile storage layer, and a second core film above the inter-layerdielectric film in which an upper surface of the first stacked film isexposed; processing the second core film in the memory-cell formingregion into a line and space shaped pattern whose half pitch is 2F andwhich extends in a direction orthogonal to an extending direction of theline and space shaped pattern formed thereunder, and processing thesecond core film in a contact forming region into a predetermined shape;slimming the second core film in the memory-cell forming region into aline and space shaped pattern whose half pitch is F; forming aloop-shaped second spacer film whose thickness is F around the patternof the second core film; removing the second core film; forming a lineand space shaped second pattern for wire formation by removing part ofthe loop-shaped second spacer film; forming a line and space shapedpattern in the memory-cell forming region and forming a pattern of adrawn wire portion which partially overlaps a formation position of thelanding-pad shaped pattern and whose width is F in any of the contactforming regions, by processing the second stacked film, the secondwiring layer, and the first stacked film with the second pattern forwire formation as a mask; embedding an inter-layer dielectric filmbetween processed patterns; forming a contact hole that communicateswith the landing-pad shaped pattern formed of the first wiring layerformed in the contact forming region after repeatedly performing aprocess from the processing the second core film to the embedding theinter-layer dielectric film between the processed patterns apredetermined number of times; and forming a contact plug by embedding aconductive material in the contact hole.
 10. The method according toclaim 9, wherein the processing the second core film includes providinga rectangular pattern to come into contact with the line and spaceshaped pattern that extends to the contact forming region, wherein therectangular pattern is arranged so that an edge portion thereof isacross a formation position of the contact plug.
 11. The methodaccording to claim 9, wherein the processing the first core filmincludes processing the first core film at the formation position of thepad-shaped pattern in the contact forming region into a line and spaceshaped pattern whose half pitch is 2F and which extends in thepredetermined direction, and the processing the first stacked film andthe first wiring layer includes processing the pad-shaped pattern in thecontact forming region as a plurality of loop-shaped wires having awidth of the half pitch F.
 12. The method according to claim 9, furthercomprising patterning first wiring layers that extend in thepredetermined direction and are formed at a same position in plan viewin a plurality of stacked films to be connected to a common contactplug.
 13. The method according to claim 9, wherein the nonvolatilestorage layer is a variable resistive element or a phase change memory.14. A method of manufacturing a nonvolatile memory device comprising:forming a lower portion wire connected to a control element via aninter-layer dielectric film above a peripheral circuit that includes thecontrol element that controls a nonvolatile memory cell formed above asubstrate; stacking a first wiring layer, a first stacked film includinga nonvolatile storage layer, and a first core film in order on the lowerportion wire via an inter-layer dielectric film; processing the firstcore film in a memory-cell forming region into a line and space shapedpattern whose half pitch is 2F and which extends in a predetermineddirection; slimming the first core film into a line and space shapedpattern whose half pitch is F; forming a loop-shaped first spacer filmwhose thickness is F around the pattern of the first core film; removingthe first core film; forming a line and space shaped first pattern forwire formation by removing part of the loop-shaped first spacer film;forming a line and space shaped pattern in the memory-cell formingregion by processing the first stacked film and the first wiring layerwith the first pattern for wire formation as a mask; embedding aninter-layer dielectric film between processed patterns; forming a secondwiring layer, a second stacked film including a nonvolatile storagelayer, and a second core film on the inter-layer dielectric film inwhich an upper surface of the first stacked film is exposed; processingthe second core film in the memory-cell forming region into a line andspace shaped pattern whose half pitch is 2F and which extends in adirection orthogonal to an extending direction of the line and spaceshaped pattern formed thereunder, and processing the second core film ina contact forming region into a predetermined shape; slimming the secondcore film in the memory-cell forming region into a line and space shapedpattern whose half pitch is F; forming a loop-shaped second spacer filmwhose thickness is F around the pattern of the second core film;removing the second core film; forming a line and space shaped secondpattern for wire formation by removing part of the loop-shaped secondspacer film; forming a line and space shaped pattern in the memory-cellforming region and forming a pattern of a drawn wire portion whichpartially overlaps a formation position of the lower portion wire andwhose width is F in any of the contact forming regions, by processingthe second stacked film, the second wiring layer, and the first stackedfilm with the second pattern for wire formation as a mask; embedding aninter-layer dielectric film between processed patterns; forming acontact hole that communicates with the lower portion wire formed in thecontact forming region after repeatedly performing a process from theprocessing the second core film to the embedding the inter-layerdielectric film between the processed patterns a predetermined number oftimes; and forming a contact plug by embedding a conductive material inthe contact hole.
 15. The method according to claim 14, wherein theprocessing the second core film includes providing a rectangular patternto come into contact with the line and space shaped pattern that extendsto the contact forming region, wherein the rectangular pattern isarranged so that an edge portion thereof is across a formation positionof the lower portion wire.
 16. The method according to claim 14, furthercomprising patterning first wiring layers that extend in thepredetermined direction and are formed at a same position in plan viewin a plurality of stacked films to be connected to a common contactplug.
 17. The method according to claim 14, wherein the nonvolatilestorage layer is a variable resistive element or a phase change memory.